Awan Statistic Report
Fab
Code
Complete
Time
Task Cont Image Count
Measure Count Complete Count Error Count Incomplete Count Point Input Complete Delta
1 DF01 20251120 3 0 3 0 0 0 0 0
2 DF01 20251121 10 10 0 0 1,530 270 90 1,440
3 DF01 20251122 4 0 4 0 0 0 0 0
4 DF01 20251123 9 9 0 0 1,377 243 81 1,296
5 DF01 20251124 12 0 0 12 0 0 0 0
6 DF01 20251125 4 4 0 0 11,532 11,532 5,766 5,766
7 DF01 20251126 2 2 0 0 5,768 5,768 2,884 2,884
8 DF01 20251127 4 4 0 0 11,536 11,536 5,710 5,826
Measure Summary
SEQ Fab Code Lot Code Recipe Name Oper Oper Desc
Data1 DF01 MON SEM_DL_HEALTH_INDEX_F16X_AWAN * -
Data2 DF01 MON SEM_DL_HEALTH_INDEX_F16X_AWAN MON-01A-001 CD1(PHOTO)
Data3 DF01 MON SEM_DL_HEALTH_INDEX_F16X_AWAN * -
Data4 DF01 MON SEM_DL_HEALTH_INDEX_F16X_AWAN MON-01A-001 CD1(PHOTO)
Data5 DF01 LOTA MULTI_RECIPE * -
Data6 DF01 LOTA R1JB_M0C_BG_OVL_Y_PROV3E_RND_R0 P95152X7B M0C ETCH CLN CD Awan(C2)
Data7 DF01 LOTA RJ1B_BG_ACTIVE_OVLY_PROV_P35_R1 G30731X5B BG ETCH CLN CD Awan(C)
Data8 DF01 LOTA RJ1B_M0CBG_OVLY_PROV_CMTP1_R0 MA000230A M0C ETCH CLN CD Awan(C5)
Measure Summary

Awan Static Report - Condition